Members

The Institute for Semiconductor Technology and Microsystems was founded in 1990 at the Faculty of Electrical Engineering at the Dresden University of Technology. Five professorships are joined and represent education and research in the fields of Semiconductor Technology, Microsystems, Optoelectronic Components and Systems, Polymer Microsystems and Nanoelectronic Materials. The main topics in the research work are concentrated on the Back-End-of-Line, advanced deposition technologies for ultrathin functional films, deposition methods for photovoltaic, the functional characterization of materials, electronic elements and systems, including organic transistors, the design of Microsystems and the fabrication of sensors and actuators based on inorganic and organic materials. The close personal alliance with the Fraunhofer IPMS Dresden and the NaMLab gGmbH increases the opportunities in education and research significantly.