Members

Fraunhofer Institute for Electronic Nano Systems (ENAS)

Smart Systems Integration, MEMS / NEMS, Waferbonden, printed functionalities, reliability, characterisation and test

The Fraunhofer Research Institution for Electronic Nano Systems ENAS in Chemnitz focuses on Smart Systems Integration using by micro and nano technologies. Smart Systems are defined as miniaturized devices that incorporate functions of sensing, actuating and control. The integration of nano materials as well as printed functionalities causes new challenges and requires new approaches in terms of reliability, testability, design and security. Fraunhofer ENAS meets these demands. The development of MEMS/NEMS ( silicon- based and non- silicon-based), wafer level packaging technologies for MEMS/NEMS, 3D-Integration and other advanced technologies, reliability and security of systems and components as well as printed functionalities belong to the core competences of Fraunhofer ENAS. 

Contact:

Fraunhofer Institute for Electronic Nano Systems

Technologie-Campus 3
D-09126 Chemnitz
Phone: +49 371 45001-0
Fax: +49 371 45001-101
Response partner:
Prof. Dr. Thomas Geßner
Email: info(at)enas.fraunhofer.de
Internet: www.enas.fraunhofer.de